Charge coupled device imaging

A summary of the progress at Texas Instruments in CCD imaging is presented. Results obtained with both long linear imagers and large area arrays are described. Critical optical parameters studied are sensitivity, modulation transfer function (MFT), dynamic range (gray shades), linearity, blooming, spectral response, element uniformity and response time. The electrical characteristics studied include charge transfer efficiency versus frequency, storage time, clocking requirements, power dissipation, and noise. The influence of these electrical characteristics on optical parameters is described. Fabricational techniques are discussed which optimize optical and electrical performance of CCD imagers with resonable device yields.