Title :
An overlapping electrode buried channel CCD
Author :
Erb, D.M. ; Kotyczka, W. ; Su, S.C. ; Wang, C. ; Clough, G.
Author_Institution :
Hughes Aircraft Company, Newport Beach, California
Keywords :
Aluminum; Charge coupled devices; Circuits; Diodes; Electrodes; Etching; Insulation; Interface states; Silicon; Voltage;
Conference_Titel :
Electron Devices Meeting, 1973 International
DOI :
10.1109/IEDM.1973.188637
