Title :
Staggered oxide C4D structure with clocked source repeater
Author :
Tchon, W.E. ; Huang, J.S.T. ; Huang, J.S.T.
Author_Institution :
Honeywell Information Systems Inc., Phoenix, Arizona
Abstract :
CCDs show promise for high density serial storage. A novel 2-phase C4D shift register is described in which the charge storage barrier is produced by a staggered oxide structure
Keywords :
Aluminum; Annealing; Charge coupled devices; Clocks; Etching; Information systems; Repeaters; Shift registers; Silicon; Voltage control;
Conference_Titel :
Electron Devices Meeting, 1973 International
DOI :
10.1109/IEDM.1973.188638