DocumentCode
3553704
Title
An improved dielectric-junction combination isolation technique for integrated circuits
Author
Sanders, T.J. ; Morcom, W.R. ; Kim, C.S.
Author_Institution
Harris Semiconductor, Melbourne, Florida
Volume
19
fYear
1973
fDate
1973
Firstpage
38
Lastpage
40
Keywords
Anisotropic magnetoresistance; Apertures; Bipolar transistors; Capacitance; Dielectrics; Electric breakdown; Etching; Integrated circuit interconnections; P-n junctions; Silicon compounds;
fLanguage
English
Publisher
ieee
Conference_Titel
Electron Devices Meeting, 1973 International
Type
conf
DOI
10.1109/IEDM.1973.188642
Filename
1477519
Link To Document