DocumentCode

3553709

Title

Implanted resistors with properties enhanced by damage

Author

Nicholas, K.H. ; Ford, R.A.

Author_Institution

Mullard Research Laboratories, Redhill, Surrey, England

Volume

19

fYear

1973

fDate

1973

Firstpage

51

Lastpage

53

Keywords

Annealing; Circuits; Doping; Hall effect; Implants; Inverters; Ion implantation; Laboratories; Resistors; Temperature;

fLanguage

English

Publisher

ieee

Conference_Titel

Electron Devices Meeting, 1973 International

Type

conf

DOI

10.1109/IEDM.1973.188646

Filename

1477523