Title :
Development of a thinned, backside-illuminated charge-coupled device imager
Author :
Shortes, S.R. ; Chan, W.W. ; Rhines, W.C. ; Barton, J.B. ; Collins, D.R.
Author_Institution :
Texas Instruments Incorporated, Dallas, Texas
Keywords :
Charge coupled devices; Charge measurement; Coatings; Current measurement; Dielectrics and electrical insulation; Fabrication; Image resolution; Instruments; Metallization; Tin;
Conference_Titel :
Electron Devices Meeting, 1973 International
DOI :
10.1109/IEDM.1973.188746
