Title :
Strong electron emission from patterned tin-indium oxide thin films
Author :
Hartwell, M. ; Fonstad, C.G.
Author_Institution :
Hughes Aircraft, Culver City, CA
Abstract :
Strong electron emission is reported from patterned thin films of tin-indium oxide and preliminary studies of this phenomenon are presented. The pattern, etched in the sputtered films using standard photolithographic techniques, is an "H" or "dumbbell" shape with a narrow crossbar. With crossbars 0.1 mm wide, in excess of 1.5 mA of emission current is typically seen with a current of 15 mA through the sample and 300 V on a collector 2 cm from the sample. The emitters are physically rugged and are not damaged by operation in a vacuum as poor as 10-5Torr.
Keywords :
Aircraft; Electrodes; Electron emission; Materials science and technology; Powders; Shape; Sputter etching; Sputtering; Tin; Transistors;
Conference_Titel :
Electron Devices Meeting, 1975 International
DOI :
10.1109/IEDM.1975.188937