• DocumentCode
    3554059
  • Title

    Interaction of oxide cathodes with gas molecules and ions

  • Author

    Boelens, P.R. ; Jespers, H.F.N. ; van Lieshout, F.J.

  • Author_Institution
    N.V. Philips Gloeilampenfabrieken, Eindhoven, the Netherlands
  • Volume
    21
  • fYear
    1975
  • fDate
    1975
  • Firstpage
    522
  • Lastpage
    525
  • Abstract
    Oxidation and reduction experiments have been done on oxide coated cathodes, using a number of gases commonly occurring in vacuum devices, notably CH4, H2, H2O, CO, CO2, and O2. The results are interpreted in terms of a chemical model of the cathode, which results in reaction probabilities; for the oxidizing gases, these are normalized to the reaction probability of Mg from the core. It is shown that this probability is near unity when the coating is subjected to external oxidizing influences. The reaction probabilities found in this way are O2:1 , CO2:O216 H2O: 0,009. For the reducing gases the reaction probabilities are, in principle, absolute; H2O 5.10-6, CO:2.10-6, CH4=3, 6.10-6With CH4two stages can be discerned: first, cracking at the cathode surface with the probability mentioned; second, reaction of the resulting carbon with the coating with a maximum rate of about 1.1013atoms cm-2. s-1. This interpretation is backed by an experiment in which the cathode was bombarded with argon and methane ions.
  • Keywords
    Atomic layer deposition; Barium; Cathodes; Chemicals; Coatings; Equations; Gases; Nickel; Oxidation; Production;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Electron Devices Meeting, 1975 International
  • Type

    conf

  • DOI
    10.1109/IEDM.1975.188938
  • Filename
    1478299