Title :
Session 2: Device technology—Device patterning techniques [breaker page]
Author_Institution :
IBM T. J. Watson Research Center, Yorktown Heights, NY, USA
Abstract :
Start of Session 2: Device Technology-Device Patterning Techniques. International Ballroom East (Chairman: V.L. Rideout; Organizer: R.F.W. Pease).
Conference_Titel :
Electron Devices Meeting, 1977 International
Conference_Location :
Washington, DC, USA
DOI :
10.1109/IEDM.1977.189141
