DocumentCode
3554456
Title
Silicon carbide field-effect and bipolar transistors
Author
Muench, W.V. ; Hoeck, P. ; Pettenpaul, E.
Author_Institution
Technische Universitaet Hannover, Hannover, Germany
Volume
23
fYear
1977
fDate
1977
Firstpage
337
Lastpage
339
Abstract
Schottky-barrier field-effect transistors and bipolar npn transistors have been produced from silicon carbide. P-n junctions were grown by LPE and VPE processes; the definition of p-n junction areas was accomplished by selective gaseous etching. A transconductance of 0.7 mA/V and β-values in the range of 4 to 8 were obtained for the FET and the bipolar devices, respectively.
Keywords
Bipolar transistors; Etching; FETs; Gold; Light emitting diodes; Nitrogen; P-n junctions; Silicon carbide; Temperature; Transconductance;
fLanguage
English
Publisher
ieee
Conference_Titel
Electron Devices Meeting, 1977 International
Type
conf
DOI
10.1109/IEDM.1977.189248
Filename
1479328
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