• DocumentCode
    3554511
  • Title

    Boron monophosphide on Si and device applications

  • Author

    Shohno, Katsufusa ; Otake, Hitoshi

  • Author_Institution
    Sophia University, Tokyo, Japan
  • Volume
    23
  • fYear
    1977
  • fDate
    1977
  • Firstpage
    490
  • Lastpage
    493
  • Abstract
    n- or p-type boron monophosphide (BP) with a forbidden energy gap of 2.0 eV was epitaxially grown on Si substrates using a B2H6-PH3-H2system, n-type (phosphorous) or p-type (boron) diffusion layers were also formed in the Si substrates. By combining the conductivity type of the BP, the diffusion layer and the Si substrate, several types of BP-Si junctions were realized. Two examples of applied devices were a wide gap window solar cell (η = 8.3%) and a wide gap emitter transistor (β = 16). The focus of our research projects on BP is the development of III-V compound semiconductor technology along the lines of the Si planar process.
  • Keywords
    Boron; Conductivity; Crystallization; Epitaxial growth; Gases; Hydrogen; Photovoltaic cells; Semiconductor materials; Substrates; Temperature dependence;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Electron Devices Meeting, 1977 International
  • Type

    conf

  • DOI
    10.1109/IEDM.1977.189298
  • Filename
    1479378