DocumentCode
3554511
Title
Boron monophosphide on Si and device applications
Author
Shohno, Katsufusa ; Otake, Hitoshi
Author_Institution
Sophia University, Tokyo, Japan
Volume
23
fYear
1977
fDate
1977
Firstpage
490
Lastpage
493
Abstract
n- or p-type boron monophosphide (BP) with a forbidden energy gap of 2.0 eV was epitaxially grown on Si substrates using a B2 H6 -PH3 -H2 system, n-type (phosphorous) or p-type (boron) diffusion layers were also formed in the Si substrates. By combining the conductivity type of the BP, the diffusion layer and the Si substrate, several types of BP-Si junctions were realized. Two examples of applied devices were a wide gap window solar cell (η = 8.3%) and a wide gap emitter transistor (β = 16). The focus of our research projects on BP is the development of III-V compound semiconductor technology along the lines of the Si planar process.
Keywords
Boron; Conductivity; Crystallization; Epitaxial growth; Gases; Hydrogen; Photovoltaic cells; Semiconductor materials; Substrates; Temperature dependence;
fLanguage
English
Publisher
ieee
Conference_Titel
Electron Devices Meeting, 1977 International
Type
conf
DOI
10.1109/IEDM.1977.189298
Filename
1479378
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