Title :
Linear photosensor array using an amorphous thin film
Author :
Tsukada, T. ; Yamamoto, H. ; Matsui, M. ; Eto, Y. ; Hirai, T. ; Maruyama, E.
Author_Institution :
Hitachi, Ltd., Tokyo, Japan
Abstract :
In this paper, the fabrication and characteristics of the linear imaging device which uses an amorphous thin film as a photoconductive detector are described. Since the amorphous film can be made by vacuum deposition, it is possible to fabricate a long, 210 mm, sensor array, which is a key component of a contact type imaging device. A contact type imaging sensor does not require an optical lens system, and this is effective in reducing the overall size of such equipment as facsimile. A prototype of the facsimile equipment was fabricated depositing a sensor film on a fiber glass substrate. This sensor film was made of Se-As-Te chalcogenide glass. LED´s were used as light sources to illuminate the original paper. The experimental results confirm that amorphous thin films are applicable to a contact-type linear photosensor array.
Keywords :
Amorphous materials; Fabrication; Facsimile; Glass; Image sensors; Optical films; Optical imaging; Optical sensors; Sensor arrays; Transistors;
Conference_Titel :
Electron Devices Meeting, 1977 International
DOI :
10.1109/IEDM.1977.189315