• DocumentCode
    3554835
  • Title

    Session 3 Device technology — Dry etching and fine line techniques

  • Author

    Hunter, W.R.

  • Author_Institution
    Texas Instruments, Inc., Dallas, TX, USA
  • fYear
    1979
  • fDate
    3-5 Dec. 1979
  • Firstpage
    43
  • Lastpage
    43
  • Abstract
    Start of the above-titled section of the conference proceedings.
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Electron Devices Meeting, 1979 Internationa
  • Conference_Location
    Washington, DC, USA
  • Type

    conf

  • DOI
    10.1109/IEDM.1979.189534
  • Filename
    1480399
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=3554835