• DocumentCode
    3554885
  • Title

    Sub-nanosecond self-aligned I2L/MTL circuits

  • Author

    Tang, D.D. ; Ning, T.H. ; Wiedman, S.K. ; Isaac, R.D. ; Feth, G.C. ; Yu, H.N.

  • Author_Institution
    IBM Thomas J. Watson Research Center, Yorktown Heights, N.Y.
  • Volume
    25
  • fYear
    1979
  • fDate
    1979
  • Firstpage
    201
  • Lastpage
    204
  • Abstract
    This paper describes a self-aligned approach to the I2L/MTL technology. Experimental ring oscillator circuits designed with 2.5 µm design rules and fabricated with this technology show a measured 0.9 ns gate delay at Ic= 70 µA (fan-in=1, fan-out=3).
  • Keywords
    Aluminum; CMOS technology; Delay; Diodes; Equivalent circuits; Rails; Resistors; Ring oscillators; Very large scale integration; Wiring;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Electron Devices Meeting, 1979 Internationa
  • Type

    conf

  • DOI
    10.1109/IEDM.1979.189578
  • Filename
    1480443
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=3554885