Title :
Session 20 Device technology — Contacts and metallization
Author_Institution :
Intel Corporation, Livermore, CA, USA
Abstract :
Start of the above-titled section of the conference proceedings.
Conference_Titel :
Electron Devices Meeting, 1979 Internationa
Conference_Location :
Washington, DC, USA
DOI :
10.1109/IEDM.1979.189653
