DocumentCode :
3554986
Title :
A polysilicon base bipolar transistor
Author :
Solomon, P.M. ; Tang, D.D. ; Isaac, R.D.
Author_Institution :
IBM T. J. Watson Research Center, Yorktown Heights, NY
Volume :
25
fYear :
1979
fDate :
1979
Firstpage :
510
Lastpage :
513
Abstract :
We have made PNP bipolar transistors consisting of n and p type polysilicon layers on a 0.01 ohm-cm p type substrate. The object of making this device was to study minority carrier transport through the n polysilicon, although we have also succeeded in making transistors with current gains greater than 5. Preliminary results indicate strong recombination in the bulk base polysilicon, with diffusion lengths less than 40nm. The base region nearest or within, the single crystal substate is much more transparent to minority carriers. In addition, the polysilicon seems to block minority carrier injection from the substrate.
Keywords :
Annealing; Atomic layer deposition; Atomic measurements; Bipolar transistors; Electrical resistance measurement; Etching; FETs; Impurities; Integrated circuit interconnections; MOS integrated circuits;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Electron Devices Meeting, 1979 Internationa
Type :
conf
DOI :
10.1109/IEDM.1979.189670
Filename :
1480535
Link To Document :
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