DocumentCode
3555014
Title
The effect of interpoly structure variation on charge transfer efficiency of a buried channel CCD
Author
Chen, C.L. ; Venkateswaran, K. ; Seto, J. ; Amelio, G.F.
Author_Institution
Fairchild Camera and Instrument Co., San Jose, California
Volume
25
fYear
1979
fDate
1979
Firstpage
606
Lastpage
610
Keywords
Boron; Charge coupled devices; Charge transfer; Clocks; Degradation; Electrodes; Fabrication; Implants; Silicon; Voltage;
fLanguage
English
Publisher
ieee
Conference_Titel
Electron Devices Meeting, 1979 Internationa
Type
conf
DOI
10.1109/IEDM.1979.189697
Filename
1480562
Link To Document