DocumentCode
3555025
Title
Investigation of microplasmas in InP avalanche photodiodes
Author
Capasso, F. ; Petroff, P.M. ; Bonner, W.B. ; Sumski, S.
Author_Institution
Bell Telephone Laboratories, Murray Hill, New Jersey, USA
Volume
25
fYear
1979
fDate
1979
Firstpage
647
Lastpage
649
Abstract
The electron beam induced current technique has been used to investigate microplasmas in InP avalanche photodiodes. It is shown that microplasmas develop along growth induced doping striations. Edge and bulk microplasmas have been detected, the latter only originating at recombination centers. Leakage currents of 15 nA at 0.9 VB and dc avalanche gains >103have been observed in the best devices.
Keywords
Avalanche photodiodes; Crystalline materials; Diodes; Electron beams; Indium phosphide; Leakage current; Plasma applications; Plasma materials processing; Spontaneous emission; Zinc;
fLanguage
English
Publisher
ieee
Conference_Titel
Electron Devices Meeting, 1979 Internationa
Type
conf
DOI
10.1109/IEDM.1979.189708
Filename
1480573
Link To Document