DocumentCode
3555032
Title
VLSI: Challenges and choices
Author
Toombs, H. Dean
Author_Institution
Texas Instruments, Incorporated, Dallas, Texas
Volume
25
fYear
1979
fDate
1979
Firstpage
674
Lastpage
674
Keywords
CMOS technology; Instruments; Integrated circuit technology; Integrated optics; MOS devices; Materials science and technology; Optical device fabrication; Photonic integrated circuits; Process design; Very large scale integration;
fLanguage
English
Publisher
ieee
Conference_Titel
Electron Devices Meeting, 1979 Internationa
Type
conf
DOI
10.1109/IEDM.1979.189715
Filename
1480580
Link To Document