Title :
An analytic charge-sharing predictor model for submicron MOSFETs
Author :
Chatterjee, Pallab K. ; Leiss, John E.
Author_Institution :
Texas Instruments Incorporated, Dallas, Texas
Abstract :
An analytic-predictor model which describes phenomena observed in small geometry MOSFETs is presented. I-V characteristics from subthreshold through saturation are predicted within the bounds of process parameter variations using only physical and structural constants as inputs. A key to the success of this model is the Dynamic Average Doping Transformation which accounts for the doping profile within the channel and is supported by experimental data. Process-device-circuit trade-offs may be examined using this model and a desk top calculator.
Keywords :
Doping profiles; Geometry; Instruments; Laboratories; MOSFETs; Optical scattering; Poisson equations; Predictive models; Semiconductor process modeling; Solid modeling;
Conference_Titel :
Electron Devices Meeting, 1980 International
DOI :
10.1109/IEDM.1980.189744