DocumentCode
3555105
Title
An analytic charge-sharing predictor model for submicron MOSFETs
Author
Chatterjee, Pallab K. ; Leiss, John E.
Author_Institution
Texas Instruments Incorporated, Dallas, Texas
Volume
26
fYear
1980
fDate
1980
Firstpage
28
Lastpage
33
Abstract
An analytic-predictor model which describes phenomena observed in small geometry MOSFETs is presented. I-V characteristics from subthreshold through saturation are predicted within the bounds of process parameter variations using only physical and structural constants as inputs. A key to the success of this model is the Dynamic Average Doping Transformation which accounts for the doping profile within the channel and is supported by experimental data. Process-device-circuit trade-offs may be examined using this model and a desk top calculator.
Keywords
Doping profiles; Geometry; Instruments; Laboratories; MOSFETs; Optical scattering; Poisson equations; Predictive models; Semiconductor process modeling; Solid modeling;
fLanguage
English
Publisher
ieee
Conference_Titel
Electron Devices Meeting, 1980 International
Type
conf
DOI
10.1109/IEDM.1980.189744
Filename
1481187
Link To Document