Title :
Stress-insensitive diffused resistor network for a high accuracy monolithic D/A converter
Author :
Komatsu, S. ; Suzuki, K. ; Iida, N. ; Aoki, T. ; Ito, T. ; Sawazaki, H. ; Ito, Takao ; Sawazaki, H.
Author_Institution :
Toshiba Corporation, Kawasaki, Japan
Abstract :
The stress-insensitive configuration of a Ladder network for a high accuracy monolithic D/A converter is described. To avoid the piezoresistance effect, a stress-insensitive crystal axis is found from the result of the new stress analysis using simple resistors as a strain-sensitive device, which is shifted by 45° from a conventional axis on a surface of
Keywords :
Compressive stress; Electrical resistance measurement; Packaging; Piezoresistance; Plastics; Resins; Resistors; Semiconductor device measurement; Silicon; Stress measurement;
Conference_Titel :
Electron Devices Meeting, 1980 International
DOI :
10.1109/IEDM.1980.189775