DocumentCode
3555221
Title
GaAs bipolar integrated circuit technology
Author
Yuan, H.T. ; McLevige, W.V. ; Doerbeck, F.H. ; Dierschke, E.G.
Author_Institution
Texas Instruments Incorporated, Dallas, Texas
Volume
26
fYear
1980
fDate
1980
Firstpage
398
Lastpage
400
Abstract
Gallium arsenide npn transistors were fabricated successfully by ion implant techniques. The transistors showed normal current gain of 20 ∼ 25 with the substrate used as collector, and inverted current gain of 5 ∼ 6 with the substrate used as emitter. By combining ion implanted resistors and using the transistors operated in the inverted model, it is possible to design and fabricate I2L-like integrated circuits simply.
Keywords
Annealing; Bipolar integrated circuits; Bipolar transistors; Gallium arsenide; High speed integrated circuits; Implants; Integrated circuit technology; Resistors; Resists; Temperature;
fLanguage
English
Publisher
ieee
Conference_Titel
Electron Devices Meeting, 1980 International
Type
conf
DOI
10.1109/IEDM.1980.189848
Filename
1481291
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