Title :
GaAs bipolar integrated circuit technology
Author :
Yuan, H.T. ; McLevige, W.V. ; Doerbeck, F.H. ; Dierschke, E.G.
Author_Institution :
Texas Instruments Incorporated, Dallas, Texas
Abstract :
Gallium arsenide npn transistors were fabricated successfully by ion implant techniques. The transistors showed normal current gain of 20 ∼ 25 with the substrate used as collector, and inverted current gain of 5 ∼ 6 with the substrate used as emitter. By combining ion implanted resistors and using the transistors operated in the inverted model, it is possible to design and fabricate I2L-like integrated circuits simply.
Keywords :
Annealing; Bipolar integrated circuits; Bipolar transistors; Gallium arsenide; High speed integrated circuits; Implants; Integrated circuit technology; Resistors; Resists; Temperature;
Conference_Titel :
Electron Devices Meeting, 1980 International
DOI :
10.1109/IEDM.1980.189848