• DocumentCode
    3555222
  • Title

    Session 16 Device technology — Pattern definition

  • Author

    Broydo, S.

  • Author_Institution
    Xerox Corporation, Palo Alto, CA, USA
  • fYear
    1980
  • fDate
    8-10 Dec. 1980
  • Firstpage
    401
  • Lastpage
    401
  • Abstract
    Start of the above-titled section of the conference proceedings record.
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Electron Devices Meeting, 1980 International
  • Conference_Location
    Washington, DC, USA
  • Type

    conf

  • DOI
    10.1109/IEDM.1980.189849
  • Filename
    1481292
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=3555222