• DocumentCode
    3555243
  • Title

    Review of field emitter array cathodes

  • Author

    Cochran, J.K. ; Chapman, A.T. ; Feeney, R.K. ; Hill, D.N.

  • Author_Institution
    Georgia Institute of Technology, Atlanta, Georgia
  • Volume
    26
  • fYear
    1980
  • fDate
    1980
  • Firstpage
    462
  • Lastpage
    466
  • Abstract
    The need for cathodes that operate at 10 A/cm2or greater with long life, instant turn on, ambient temperature operation, and capable of being modulated with small voltages has led to the development of Field Emitter Array Cathodes (FEA´s). FEA´s are arrays of micron-sized pointed emitter cones positioned approximately one micron from a micron-sized aperture in an electrically isolated extractor grid. With a small positive voltage (100-200 volts) applied to the extractor, the high field gradient produced by the close spacing and the enhancement from the pointed tips results in field emission. Through the application of thin film microfabrication and crystal growth technology, arrays of 106-107electron guns/cm2are currently being developed by different fabrication techniques at three laboratories. Experiments at two of the laboratories have demonstrated current densities of 10-20 A/cm2and with reasonable advances, increases in current density of an order of magnitude are projected.
  • Keywords
    Apertures; Cathodes; Current density; Electron guns; Field emitter arrays; Isolation technology; Laboratories; Temperature; Transistors; Voltage;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Electron Devices Meeting, 1980 International
  • Type

    conf

  • DOI
    10.1109/IEDM.1980.189867
  • Filename
    1481310