DocumentCode
3555243
Title
Review of field emitter array cathodes
Author
Cochran, J.K. ; Chapman, A.T. ; Feeney, R.K. ; Hill, D.N.
Author_Institution
Georgia Institute of Technology, Atlanta, Georgia
Volume
26
fYear
1980
fDate
1980
Firstpage
462
Lastpage
466
Abstract
The need for cathodes that operate at 10 A/cm2or greater with long life, instant turn on, ambient temperature operation, and capable of being modulated with small voltages has led to the development of Field Emitter Array Cathodes (FEA´s). FEA´s are arrays of micron-sized pointed emitter cones positioned approximately one micron from a micron-sized aperture in an electrically isolated extractor grid. With a small positive voltage (100-200 volts) applied to the extractor, the high field gradient produced by the close spacing and the enhancement from the pointed tips results in field emission. Through the application of thin film microfabrication and crystal growth technology, arrays of 106-107electron guns/cm2are currently being developed by different fabrication techniques at three laboratories. Experiments at two of the laboratories have demonstrated current densities of 10-20 A/cm2and with reasonable advances, increases in current density of an order of magnitude are projected.
Keywords
Apertures; Cathodes; Current density; Electron guns; Field emitter arrays; Isolation technology; Laboratories; Temperature; Transistors; Voltage;
fLanguage
English
Publisher
ieee
Conference_Titel
Electron Devices Meeting, 1980 International
Type
conf
DOI
10.1109/IEDM.1980.189867
Filename
1481310
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