Title :
A new conduction model for polycrystalline silicon films
Author :
Lu, N.C.C. ; Gerzberg, L. ; Lu, C.Y. ; Meindl, J.D.
Author_Institution :
Stanford University, Stanford, California
Keywords :
Conductive films; Doping; Electrical resistance measurement; Scattering; Semiconductor films; Semiconductor process modeling; Silicon; Tellurium; Temperature distribution; Thermionic emission;
Conference_Titel :
Electron Devices Meeting, 1980 International
DOI :
10.1109/IEDM.1980.189969
