DocumentCode

3555365

Title

Lateral epitaxy by seeded solidification for growth of single-crystal Si films on insulators

Author

Fan, John C C ; Geis, M.W. ; Tsaur, Bor-Yeu

Author_Institution

Massachusetts Institute of Technology, Lexington, Massachusetts

Volume

26

fYear

1980

fDate

1980

Firstpage

845

Lastpage

845

Keywords

Amorphous materials; Epitaxial growth; Government; Insulation; Laboratories; Semiconductor films; Strips; Substrates;

fLanguage

English

Publisher

ieee

Conference_Titel

Electron Devices Meeting, 1980 International

Type

conf

DOI

10.1109/IEDM.1980.189977

Filename

1481420