DocumentCode

3555368

Title

A planar-processed PI-FET accelerometer

Author

Chen, P. ; Jolly, R. ; Halac, G. ; Muller, R.S. ; White, R.M. ; Andrews, A.P. ; Motamedi, M.E.

Author_Institution

University of California, Berkeley

Volume

26

fYear

1980

fDate

1980

Firstpage

848

Lastpage

849

Keywords

Accelerometers; Anisotropic magnetoresistance; Capacitive sensors; Etching; Laboratories; MOSFETs; Signal design; Silicon; Voltage; Zinc oxide;

fLanguage

English

Publisher

ieee

Conference_Titel

Electron Devices Meeting, 1980 International

Type

conf

DOI

10.1109/IEDM.1980.189980

Filename

1481423