Title :
Session 3 Device technology — Interconnects and contacts for VLSI
Author :
Barbe, D.F. ; Brown, Dennis M.
Author_Institution :
Navy Department, Washington, DC, USA
Abstract :
Start of the above-titled section of the conference proceedings.
Conference_Titel :
Electron Devices Meeting, 1981 International
Conference_Location :
Washington, DC, USA
DOI :
10.1109/IEDM.1981.189995
