• DocumentCode
    3555433
  • Title

    Session 3 Device technology — Interconnects and contacts for VLSI

  • Author

    Barbe, D.F. ; Brown, Dennis M.

  • Author_Institution
    Navy Department, Washington, DC, USA
  • fYear
    1981
  • fDate
    7-9 Dec. 1981
  • Firstpage
    49
  • Lastpage
    49
  • Abstract
    Start of the above-titled section of the conference proceedings.
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Electron Devices Meeting, 1981 International
  • Conference_Location
    Washington, DC, USA
  • Type

    conf

  • DOI
    10.1109/IEDM.1981.189995
  • Filename
    1481948
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=3555433