Title :
Aluminum thermomigration technology for 3-dimensional integrated circuits
Author :
Lee, J.Y.M. ; Brown, R.H. ; Etchells, R.D. ; Grinberg, J. ; Nudd, G.R. ; Nygaar, P.A.
Author_Institution :
Hughes Research Laboratories, Malibu, California
Keywords :
Aluminum; Crystals; Etching; Geometry; Integrated circuit technology; Laboratories; Microelectronics; Silicon; Solids; Wires;
Conference_Titel :
Electron Devices Meeting, 1981 International
DOI :
10.1109/IEDM.1981.190000
