• DocumentCode
    3555521
  • Title

    A contact-type linear sensor with a GD a-Si:H photodetector array

  • Author

    Kanoh, Y. ; Usui, S. ; Sawada, A. ; Kikuchi, M.

  • Author_Institution
    Sony Corporation Research Center, Yokohama, Japan
  • Volume
    27
  • fYear
    1981
  • fDate
    1981
  • Firstpage
    313
  • Lastpage
    316
  • Abstract
    A 512-element contact-type linear sensor using glow discharge-produced a-Si: H as a photo-sensor material has been developed. The sensor, comprised of a sensor plate and a compact optical system, measures 80mm × 46mm × 20mm. The sensor plate is a pyrex glass substrate on which a-Si:H photodetector array is formed and 4 MOS IC chips are mounted. Elastomer connectors were used to connect the electrodes of the photodetectors to the corresponding pads on the IC chips, allowing us to make the linear sensor very compact. The optical system has a rod lens array and two tungsten lamps as a light source. This new linear sensor provides a satisfactory image with a resolution of 7 lines/mm and an S/N ratio of at least 20 dB on a memory scope or on a printer.
  • Keywords
    Connectors; Electrodes; Glass; Optical arrays; Optical materials; Optical sensors; Photodetectors; Semiconductor device measurement; Sensor arrays; Sensor systems;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Electron Devices Meeting, 1981 International
  • Type

    conf

  • DOI
    10.1109/IEDM.1981.190074
  • Filename
    1482027