DocumentCode
3555521
Title
A contact-type linear sensor with a GD a-Si:H photodetector array
Author
Kanoh, Y. ; Usui, S. ; Sawada, A. ; Kikuchi, M.
Author_Institution
Sony Corporation Research Center, Yokohama, Japan
Volume
27
fYear
1981
fDate
1981
Firstpage
313
Lastpage
316
Abstract
A 512-element contact-type linear sensor using glow discharge-produced a-Si: H as a photo-sensor material has been developed. The sensor, comprised of a sensor plate and a compact optical system, measures 80mm × 46mm × 20mm. The sensor plate is a pyrex glass substrate on which a-Si:H photodetector array is formed and 4 MOS IC chips are mounted. Elastomer connectors were used to connect the electrodes of the photodetectors to the corresponding pads on the IC chips, allowing us to make the linear sensor very compact. The optical system has a rod lens array and two tungsten lamps as a light source. This new linear sensor provides a satisfactory image with a resolution of 7 lines/mm and an S/N ratio of at least 20 dB on a memory scope or on a printer.
Keywords
Connectors; Electrodes; Glass; Optical arrays; Optical materials; Optical sensors; Photodetectors; Semiconductor device measurement; Sensor arrays; Sensor systems;
fLanguage
English
Publisher
ieee
Conference_Titel
Electron Devices Meeting, 1981 International
Type
conf
DOI
10.1109/IEDM.1981.190074
Filename
1482027
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