DocumentCode :
3555627
Title :
VLSI Technologies - A future perspective
Author :
Crowder, B.L.
Author_Institution :
IBM Thomas J. Watson Research Center, Yorktown Heights, NY
fYear :
1981
fDate :
7-9 Dec. 1981
Firstpage :
646
Lastpage :
646
Keywords :
Circuits; Etching; Ion implantation; Lithography; Materials science and technology; Microelectronics; Semiconductor devices; Silicon; Temperature; Very large scale integration;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Electron Devices Meeting, 1981 International
Conference_Location :
Washington, DC, USA
Type :
conf
DOI :
10.1109/IEDM.1981.190169
Filename :
1482122
Link To Document :
https://search.ricest.ac.ir/dl/search/defaultta.aspx?DTC=49&DC=3555627
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