DocumentCode
3555627
Title
VLSI Technologies - A future perspective
Author
Crowder, B.L.
Author_Institution
IBM Thomas J. Watson Research Center, Yorktown Heights, NY
fYear
1981
fDate
7-9 Dec. 1981
Firstpage
646
Lastpage
646
Keywords
Circuits; Etching; Ion implantation; Lithography; Materials science and technology; Microelectronics; Semiconductor devices; Silicon; Temperature; Very large scale integration;
fLanguage
English
Publisher
ieee
Conference_Titel
Electron Devices Meeting, 1981 International
Conference_Location
Washington, DC, USA
Type
conf
DOI
10.1109/IEDM.1981.190169
Filename
1482122
Link To Document