DocumentCode

3555647

Title

Sealed-interface local oxidation technology

Author

Hui, J. ; Chiu, T.Y. ; Wong, S. ; Oldham, W.G.

Author_Institution

University of California, Berkeley, California

Volume

27

fYear

1981

fDate

1981

Firstpage

706

Lastpage

706

Keywords

Argon; Implants; Laboratories; Lead compounds; Oxidation; Stress;

fLanguage

English

Publisher

ieee

Conference_Titel

Electron Devices Meeting, 1981 International

Type

conf

DOI

10.1109/IEDM.1981.190188

Filename

1482141