• DocumentCode
    3555748
  • Title

    The effect of thin gate dielectrics on scaling MOS devices

  • Author

    Sodini, C.G. ; Moll, J.L.

  • Author_Institution
    Hewlett Packard, Inc., Palo Alto, CA
  • Volume
    28
  • fYear
    1982
  • fDate
    1982
  • Firstpage
    103
  • Lastpage
    106
  • Keywords
    Capacitance; Dielectric devices; Dielectric substrates; Equations; Integrated circuit synthesis; Laboratories; MOS devices; Power supplies; Semiconductor device doping; Threshold voltage;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Electron Devices Meeting, 1982 International
  • Type

    conf

  • DOI
    10.1109/IEDM.1982.190224
  • Filename
    1482758