Title :
Twin-channel substrate-mesa-guide injection lasers fabricated by OMVPE
Author :
Ackley, D.E. ; Hom, G.
Author_Institution :
Hewlett-Packard Laboratories, Palo Alto, California
Abstract :
An easily fabricated high power index-guided laser, the twin-channel substrate-mesa-guide (TCSM) laser, has been developed for applications in recording, printing, and communications. The TCSM laser is fabricated by one-step organometallic vapor phase epitaxy (OMVPE) on photolithographically patterned and etched substrates. Linear output characteristics were observed to 40 mW cw with corresponding operation in zero order lateral and transverse modes and no astigmatism. Stable single longitudinal mode oscillation also resulted from the strong refractive index guiding produced by the non-planar structure.
Keywords :
Epitaxial growth; Etching; Laser beams; Laser modes; Optical device fabrication; Optical waveguides; Power generation; Power lasers; Vision defects; Waveguide lasers;
Conference_Titel :
Electron Devices Meeting, 1982 International
DOI :
10.1109/IEDM.1982.190291