Title :
Session 15 Device technology — Lithography and pattern transfer
Author :
Griffing, B. ; Gutmann, R.
Author_Institution :
General Electric Company, Schenectady, NY, USA
Abstract :
Start of the above-titled section of the conference proceedings.
Conference_Titel :
Electron Devices Meeting, 1982 International
Conference_Location :
San Francisco, CA, USA
DOI :
10.1109/IEDM.1982.190304
