• DocumentCode
    3555837
  • Title

    Session 15 Device technology — Lithography and pattern transfer

  • Author

    Griffing, B. ; Gutmann, R.

  • Author_Institution
    General Electric Company, Schenectady, NY, USA
  • fYear
    1982
  • fDate
    13-15 Dec. 1982
  • Firstpage
    389
  • Lastpage
    389
  • Abstract
    Start of the above-titled section of the conference proceedings.
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Electron Devices Meeting, 1982 International
  • Conference_Location
    San Francisco, CA, USA
  • Type

    conf

  • DOI
    10.1109/IEDM.1982.190304
  • Filename
    1482838
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=3555837