Title :
Session 16 Device technology — Technologies for silicon-on-insulator devices
Author :
Antoniadis, Dimitri A. ; Friedrich, H.
Author_Institution :
Massachusetts Institute of Technology, Cambridge, MA, USA
Abstract :
Start of the above-titled section of the conference proceedings.
Conference_Titel :
Electron Devices Meeting, 1982 International
Conference_Location :
San Francisco, CA, USA
DOI :
10.1109/IEDM.1982.190313
