Title :
CMOS Latch-up elimination using Schottky barrier PMOS
Author :
Sugino, M. ; Akers, L.A. ; Rebeschini, M.E.
Author_Institution :
Semiconductor Research and Development Laboratory, Motorola, Phoenix, AZ
Abstract :
A common failure mechanism in bulk CMOS integrated circuits is due to latch-up of the parasitic SCR structure. Using Schottky barrier junctions for the source and drain of the P channel transistors eliminates the PNPN structure. A technology utilizing platinum-silicide P channel source and drain and ion implanted N channel source and drain was realized demonstrating latch-up resistance without many sacrifices inherent with other methods. Anomalies in the P-MOSFET characteristics are reported and discussed.
Keywords :
Bipolar transistors; CMOS integrated circuits; CMOS technology; Laboratories; MOSFET circuits; Schottky barriers; Schottky diodes; Semiconductor diodes; Switches; Thyristors;
Conference_Titel :
Electron Devices Meeting, 1982 International
DOI :
10.1109/IEDM.1982.190325