• DocumentCode
    3555879
  • Title

    Session 20 The silicon foundry — Myth or reality?

  • Author

    Logue, J.C.

  • Author_Institution
    IBM, Yorktown Heights, New York
  • fYear
    1982
  • fDate
    13-15 Dec. 1982
  • Firstpage
    539
  • Lastpage
    539
  • Abstract
    Start of the above-titled section of the conference proceedings.
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Electron Devices Meeting, 1982 International
  • Conference_Location
    San Francisco, CA, USA
  • Type

    conf

  • DOI
    10.1109/IEDM.1982.190345
  • Filename
    1482879
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=3555879