• DocumentCode
    3555883
  • Title

    Session 24 Device technology — Advanced interconnect technologies

  • Author

    Parrillo, L.C. ; Minagawa, S.

  • Author_Institution
    Bell Laboratories, Murray Hill, NJ
  • fYear
    1982
  • fDate
    13-15 Dec. 1982
  • Firstpage
    547
  • Lastpage
    547
  • Abstract
    Start of the above-titled section of the conference proceedings.
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Electron Devices Meeting, 1982 International
  • Conference_Location
    San Francisco, CA, USA
  • Type

    conf

  • DOI
    10.1109/IEDM.1982.190349
  • Filename
    1482883