DocumentCode
3555922
Title
On the Monte Carlo simulation of bipolar device
Author
Park, Y.J. ; Tang, T.W. ; Navon, D.H.
Author_Institution
University of Massachusetts, Amherst, MA
Volume
28
fYear
1982
fDate
1982
Firstpage
688
Lastpage
691
Abstract
The Monte Carlo method has been applied to an NPN silicon bipolar transistor with base and emitter widths less than O.2µm. A regional approach is adopted where the device is divided into the emitter, base, collector, and space charge regions. Only the transport of minority carriers is simulated in the submicron emitter and base regions. A comparison of the results of the Monte Carlo simulation in the base region with those obtained by solving the drift-diffusion equation shows that the latter equation predicts the carrier transport well if the absorbing boundary velocity obtained from the Monte Carlo simulation is used. However, a substantial discrepancy has been found for a very thin emitter simulation where a large retarding field is present.
Keywords
Charge carrier processes; Doping; Equations; Impurities; Monte Carlo methods; Predictive models; Scattering; Semiconductor process modeling; Silicon; Space charge;
fLanguage
English
Publisher
ieee
Conference_Titel
Electron Devices Meeting, 1982 International
Type
conf
DOI
10.1109/IEDM.1982.190387
Filename
1482921
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