Title :
A corrugated capacitor cell (CCC) for megabit dynamic MOS memories
Author :
Sunami, H. ; Kure, T. ; Hashimoto, N. ; Itoh, K. ; Toyabe, T. ; Asai, S.
Author_Institution :
Hitachi Ltd., Kokubunji, Tokyo, Japan
Keywords :
Capacitance; Charge carrier lifetime; Dry etching; Insulation; Laboratories; MOS capacitors; Physics; Voltage;
Conference_Titel :
Electron Devices Meeting, 1982 International
DOI :
10.1109/IEDM.1982.190421
