DocumentCode
3555969
Title
Theoretical, practical and analogical limits in ULSI
Author
Meindl, J.D.
Author_Institution
Stanford University, Stanford, California
Volume
29
fYear
1983
fDate
1983
Firstpage
8
Lastpage
13
Keywords
CMOS technology; Information processing; Integrated circuit interconnections; Logic design; Material properties; Semiconductor device measurement; Silicon; Ultra large scale integration; Very large scale integration; Voltage;
fLanguage
English
Publisher
ieee
Conference_Titel
Electron Devices Meeting, 1983 International
Type
conf
DOI
10.1109/IEDM.1983.190428
Filename
1483553
Link To Document