DocumentCode
3556072
Title
A high performance high voltage lateral PNP structure
Author
Beasom, James D.
Author_Institution
Harris Semiconductor, Melbourne, Florida
Volume
29
fYear
1983
fDate
1983
Firstpage
424
Lastpage
427
Abstract
An improved high voltage lateral PNP structure is described. Devices built with the structure have HFE and Early voltage as good as quality discrete devices and maintain fT greater than 1.5 MHz at 350V. The process is simpler than those previously described for production of complementary vertical devices. Experimental results for a range of profiles and geometries are presented.
Keywords
Application specific integrated circuits; Bandwidth; Doping profiles; Geometry; Impurities; Low voltage; Niobium; Nonhomogeneous media; Poisson equations; Production;
fLanguage
English
Publisher
ieee
Conference_Titel
Electron Devices Meeting, 1983 International
Type
conf
DOI
10.1109/IEDM.1983.190532
Filename
1483657
Link To Document