Design considerations for scaling FLOTOX E2PROM cell

The design considerations for scaling the FLOTOX E²PROM cell are presented in this paper. The smaller cell can be achieved by optimizing the programming voltage, reducing the interpoly coupling capacitor and scaling the tunnel dielectric thickness. To maintain the high reliability of the scaled cell the electric field stress during both programming and storage need to remain constant in scaling. An empirical model was developed to aid the design of various cell parameters. The impact on the read disturb due to a thinner tunnel dielectric is also examined. The read disturb can be eliminated by properly designing the gate and drain voltages during read.