Sensors with on-chip signal processing for long-term stability

A monolithic silicon sensor which combines a sensing element with signal-processing circuitry can provide an output signal in which the desired information is preserved, despite electrical deterioration of the connections to the sensor. With such a stable sensor, temperature dependence and nonlinearity in the sensing characteristics of the sensor can be completely compensated. Comparatively simple packaging design will serve adequately even in hostile environments, thus resulting in significant reductions in sensor cost and a corresponding increase in sensor usage.