Title :
Monolithic 128 × 128 InSb FPA´s for staring infrared imaging systems
Author :
Bahraman, A. ; Pocock, D.N.
Author_Institution :
Northrop Research and Technology Center, Palos Verdes Peninsula, California
Abstract :
A 128 × 128 monolithic InSb array is developed for application in staring infrared imaging systems operating in the 3-5 µm spectral range. The array uses a 1.2 × 1.2 mil unit cell with a measured bucket capacity of about 500,000 carriers. Factors affecting bucket capacity are discussed. Thermal imagery was demonstrated with an experimental laboratory model operating at 30 frames/sec. A system MRT of 0.5°C, limited by preamplifier noise and offsets, was measured for a single frame of data. The theoretical NE Δ T for operation under ideal conditions is 0.04°C with no frame averaging.
Keywords :
Capacitance-voltage characteristics; Detectors; Etching; Fabrication; Infrared imaging; Optical imaging; Optical signal processing; Process design; Sensor arrays; Silicon;
Conference_Titel :
Electron Devices Meeting, 1983 International
Conference_Location :
Washington, DC, USA
DOI :
10.1109/IEDM.1983.190611