SiGMOS - A silicon gigabit/s NMOS technology

Author

Ko, P.K. ; Voshchenkov, A.M. ; Hanson, R.C. ; Grabbe, P. ; Tennant, D.M. ; Archer, V.D. ; Chin, G.M. ; Lau, M. ; Soo, D.C. ; Wooley, B.A.

Author_Institution

Bell Laboratories, Holmdel, New Jersey

fYear

1983

fDate

5-7 Dec. 1983

Firstpage

751

Lastpage

753

Keywords

Artificial intelligence; Circuits; Etching; Fabrication; Implants; MOS devices; Oxidation; Parasitic capacitance; Resists; Silicon;

fLanguage

English

Publisher

ieee

Conference_Titel

Electron Devices Meeting, 1983 International

Conference_Location

Washington, DC, USA

Type

DOI

10.1109/IEDM.1983.190620

Filename

1483745

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