A mutual capacitive normal-and shear-sensitive tactile sensor

A new type of tactile sensor is introduced for either robotics [1] or prosthetic applications. The sensor, made by IC microfabrication techniques, detects displacement of a shielding plate which alters the mutual capacitance between two electrodes. Both normal and shear sensitivity are obtained, and a 16% change of capacitance is produced by a normal stress of 5 gw/cm². Torque sensitivity can also be expected.