DocumentCode
3556278
Title
Surface leakage current mechanisms in HgCdTe gate controlled photodiodes
Author
Rosbeck, J.P. ; Blazejewski, E.R.
Author_Institution
Santa Barbara Research Center, Goleta, California
Volume
30
fYear
1984
fDate
1984
Firstpage
389
Lastpage
392
Abstract
HgCdTe gated photodiodes are studied theoretically and experimentally for surface leakage current mechanisms limiting diode performance. Use of a second field plate beyond the perimeter gate has allowed clear identification of leakage components associated with surface state generation, depletion region generation, and field induced tunneling. The fundamental features of the leakage current profiles are derived from MOS theory, and exhibit characteristics similar to the properties of the SiO2 /Si interface with some added features peculiar to narrow bandgap semiconductors. Both boron implanted and double layer p-n junction devices in the 2 to 5 µm range are examined. Surface potential was found to have a significant effect on diode impedance and breakdown characteristics. Minimum surface state densities derived from diode leakage current versus gate bias curves were in the range of 1011cm-2eV-1.
Keywords
Boron; Indium; Ion implantation; Leakage current; P-n junctions; Photodiodes; Photonic band gap; Semiconductor diodes; Surface impedance; Tunneling;
fLanguage
English
Publisher
ieee
Conference_Titel
Electron Devices Meeting, 1984 International
Type
conf
DOI
10.1109/IEDM.1984.190731
Filename
1484502
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