Title :
Session 26 Device technology — Advanced isolation technologies
Author :
Oldham, W.G. ; Shibata, Takuma
Author_Institution :
University of California, Berkeley, CA, USA
Abstract :
Start of the above-titled section of the conference proceedings.
Conference_Titel :
Electron Devices Meeting, 1984 International
Conference_Location :
San Francisco, CA, USA
DOI :
10.1109/IEDM.1984.190784
